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Paul Scherrer Institute, Laboratory for Micro- and Nanotechnology

PSI is a national laboratory in Switzerland belonging to the Board of Swiss Federal Institutes of Technology. With about 1200 employees PSI is one of the largest research institutions in Switzerland, mainly active in materials science, energy research and the building and operation of large scale facilities for science. In this context PSI operates a modern synchrotron light source and a spallation-based neutron source, both installations mainly being used for materials science through a large number of external and internal users.
Starting 1993 PSI started building up the Laboratory for Micro- and Nanotechnology (LMN) with the goal to do high level scientific research based mainly on the technological capabilities of advanced nanofabrication methods.
The main research activities of LMN are: X-ray optics and X-ray lithography; investigations of nanomagnetic structures; molecular nanotechnology on surfaces; optical investigations of semiconducting nanomaterials (mainly Si-Ge); nanofabrication technologies in polymers; high current field emitter technology for applications in advanced FELs. Details can be found at About 60 peer review papers and more than 150 conference contributions are produced annually by LMN.
350m2 of clean room laboratories are operated by LMN equipped with all kinds of nanofabrication equipment. This includes: electron-beam lithography, optical and soft X-ray lithography, five different dry etching machines for pattern transfer, thin film deposition equipment (evaporation, sputtering, LPCVD, PECVD), Si-oxidation and more. This lab is also available to external users.
Link to the goals of this proposal
Already now LMN is heavily engaged in the micro- and nanofabrication of samples to be investigated by synchrotron radiation or by neutrons. In parallel, LMN is working on micro-devices to improve the large facilities such as e.g. X-ray optical devices or detectors and beam monitors. Thus, LMN can bring in valuable experience for this planned project. If this proposal will be funded, LMN can further increase and reinforce its activities in this important field. Some achieved highlights in this context include: 1. World record for resolution (12 nm lines/spaces) in photon based lithography using coherent soft X-rays from our synchrotron. 2. Diffractive optical elements (gratings/zone plates) for high resolution (sub 100nm), synchrotron based hard X-ray tomography.
3. Electron-beam lithography for fabrication of ferromagnetic nanostructures for synchrotron/PEEM experiments. 4. Diffraction gratings for interferometers for phase-contrast neutron radiography.
  • Research area: INFRA-2007-2.1-01
  • Contract Type: Collaborative project
  • Project reference: 212348
  • Start Date: 2008-06-01
  • Duration: 24 months
NFFA - Nanoscale Foundries and Fine Analysis is a project funded by the European Commission under the Seventh Framework Programme, under Capacities Specific Programme Research Infrastructures
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